The University of Sheffield
Electron Beam Lithography

Contact

The electron beam lithography facility is located in the Department of Electronic and Electrical Engineering together with the EPSRC National Centre for III-V Technologies.

Please direct all electron beam lithography related enquiries in the first instance to Dr Paul W. Fry.

Address:
Department of Electronic and Electrical Engineering
University of Sheffield
Sir Frederick Mappin Building
Mappin Street
Sheffield S1 3JD
United Kingdom

Telephone:
+44 (0)114 2225823 (Office)
+44 (0)114 2225883 (EBL Lab.)

Fax:
+44 (0)114 2225143

email : Dr Paul Fry